Vanguard Group. has filed a patent for a method of forming a micro-electromechanical system (MEMS) device. The device includes a composite substrate, cavity, piezoelectric stacking structure, and proof mass. The method involves specific steps to create the device, enhancing its functionality. GlobalData’s report on Vanguard Group gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Vanguard Group, Retail trading platforms was a key innovation area identified from patents. Vanguard Group's grant share as of January 2024 was 84%. Grant share is based on the ratio of number of grants to total number of patents.

Mems device fabrication method with composite substrate and piezoelectric structure

Source: United States Patent and Trademark Office (USPTO). Credit: The Vanguard Group Inc

The patent application (Publication Number: US20240040932A1) describes a method for forming a micro-electromechanical system device. The process involves providing a composite substrate with semiconductor layers, forming a cavity that extends through the layers, creating a piezoelectric stacking structure with a suspended region over the cavity, and connecting a proof mass to the structure. Additional steps include forming trenches in the second semiconductor layer to define spacing for the proof mass, oxidizing the spacing to create an oxidation region, and removing the oxidation region to form part of the cavity.

Furthermore, the method includes forming an insulating layer on the second semiconductor layer before the piezoelectric stacking structure is created, removing the insulating layer after the structure is formed, and exposing the bottom surface of the structure. The proof mass is formed from a portion of the second semiconductor layer, with its coverage area being 10% to 90% less than the suspended region. Additionally, a cover layer can be formed on the piezoelectric stacking structure to create a vacuum cavity. Multiple suspended regions and proof masses can also be formed in the device, extending along the same direction to enhance functionality and performance.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.